Invention Grant
- Patent Title: Method for detecting wavefront aberration for optical imaging system based on grating shearing interferometer
-
Application No.: US16685159Application Date: 2019-11-15
-
Publication No.: US10969274B2Publication Date: 2021-04-06
- Inventor: Yunjun Lu , Feng Tang , Xiangzhao Wang
- Applicant: Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
- Applicant Address: CN Shanghai
- Assignee: Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
- Current Assignee: Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
- Current Assignee Address: CN Shanghai
- Agency: Mei & Mark LLP
- Agent Manni Li
- Priority: CN201910183242.1 20190312
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01J3/02 ; G01J3/10 ; G01J3/18

Abstract:
Method for detecting wavefront aberration for optical imaging system based on grating shearing interferometer, the grating shearing interferometer system comprising a light source and illumination system, an optical imaging system to be tested, a one-dimensional diffraction grating plate, a two-dimensional diffraction grating plate, a two-dimensional photoelectric sensor, and a computing unit. The one-dimensional and two-dimensional diffraction grating plates are respectively placed on the object plane and the image plane of the optical imaging system to be tested. By collecting interferograms with phase-shifting amounts of 0, π/2, π, 3π/2 and N sets of α, π-α, 2π-α (where, N = 2 ( fix ( ceil ( 1 / s ) 2 ) + 1 ) , s is the shear ratio of the grating shearing interferometer system), combined with a certain phase retrieval algorithm, the influence of all high-order diffraction beams on the phase retrieval accuracy is eliminated, and finally the detection accuracy of wavefront aberration for the imaging system to be tested is improved.
Public/Granted literature
Information query