Invention Grant
- Patent Title: Ellipsometer
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Application No.: US16359619Application Date: 2019-03-20
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Publication No.: US10969329B2Publication Date: 2021-04-06
- Inventor: Yongwoon Lim
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-si
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin-si
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2018-0060413 20180528
- Main IPC: G01N21/21
- IPC: G01N21/21

Abstract:
An ellipsometer includes: a gantry; a polarization generator and a polarization analyzer mounted in the gantry; and a focusing lens disposed on a sample on a stage, wherein the sample is an object to be measured, wherein a vertical section of the focusing lens is a semi-circle.
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