Invention Grant
- Patent Title: Physical quantity sensor, physical quantity sensor device, electronic apparatus, and movable object
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Application No.: US16531860Application Date: 2019-08-05
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Publication No.: US10969403B2Publication Date: 2021-04-06
- Inventor: Satoru Tanaka
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2016-237919 20161207
- Main IPC: G01P15/125
- IPC: G01P15/125 ; B60G17/019 ; G01P15/08

Abstract:
A physical quantity sensor includes a stationary electrode, an X-axis displaceable movable member, and a movable electrode. The stationary electrode includes first and second movable electrodes arranged side by side along the Y-axis direction. The first and second stationary electrodes respectively include first and second stationary electrode fingers extending from first and second trunks in the ±Y-axis directions. The movable electrode includes first and second movable electrodes arranged side by side in the Y-axis direction. The first and second movable electrodes respectively include first and second movable electrode fingers located on both sides in the Y-axis direction of the first and second trunks, and opposed to the first and second stationary electrode fingers.
Public/Granted literature
- US20190353678A1 PHYSICAL QUANTITY SENSOR, PHYSICAL QUANTITY SENSOR DEVICE, ELECTRONIC APPARATUS, AND MOVABLE OBJECT Public/Granted day:2019-11-21
Information query
IPC分类: