Invention Grant
- Patent Title: Concept for compensating for a mechanical stress of a hall sensor circuit integrated into a semiconductor substrate
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Application No.: US16395644Application Date: 2019-04-26
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Publication No.: US10969444B2Publication Date: 2021-04-06
- Inventor: Mario Motz
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Harrity & Harrity, LLP
- Priority: DE102018111753.1 20180516
- Main IPC: G01R33/00
- IPC: G01R33/00 ; G01R33/07 ; H01L43/14 ; H01L43/06

Abstract:
The present disclosure describes a semiconductor circuit arrangement comprising a Hall sensor circuit integrated into a semiconductor substrate and configured to conduct a Hall supply current between a first terminal and a second terminal of a Hall effect region at an angle of 45° with respect to a normal to a primary flat plane of the semiconductor substrate laterally through the Hall effect region, wherein the Hall supply current has a first dependence on a mechanical stress of the semiconductor substrate. A resistance arrangement integrated into the semiconductor substrate, the resistance arrangement being different than the Hall effect region, is configured to conduct a current between a first terminal and a second terminal of the resistance arrangement, wherein the current through the resistance arrangement has a second dependence on the mechanical stress of the semiconductor substrate. A compensation circuit is configured to correct, on the basis of a signal difference between the first terminal of the Hall effect region and the first terminal of the resistance arrangement, a Hall voltage that is measured between a third and a fourth terminal of the Hall effect region and is dependent on the mechanical stress of the semiconductor substrate.
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