Invention Grant
- Patent Title: Photomask and exposure method
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Application No.: US16106181Application Date: 2018-08-21
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Publication No.: US10969676B2Publication Date: 2021-04-06
- Inventor: Chengyong He , Yang Wang , Jun Yang , Xin Wang , Guanzheng Li , Jinxiang Li , Xingming Wang , Peng Cai , Xiaochen Cui , Junwei Zhang , Can Zhang , Chunjie Wang
- Applicant: BOE TECHNOLOGY GROUP CO., LTD. , CHONGQING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Applicant Address: CN Beijing; CN Chongqing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.,CHONGQING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.,CHONGQING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Beijing; CN Chongqing
- Agency: Brooks Kushman P.C.
- Priority: CN201810001473.1 20180102
- Main IPC: G03F1/50
- IPC: G03F1/50 ; G03F7/20 ; H01L27/12

Abstract:
A photomask and an exposure method are provided. The photomask includes a photomask body including a first surface and a second surface opposite to each other; and a first light-transmissive region penetrating through the first surface and the second surface, wherein a light adjustment component is in the first light-transmissive region and configured to converge a first light beam incident onto the first surface to a second light beam emergent from the second surface, and a cross-sectional area of the first light beam sectioned by the first surface is larger than that of the second light beam sectioned by the second surface.
Public/Granted literature
- US20190204729A1 PHOTOMASK AND EXPOSURE METHOD Public/Granted day:2019-07-04
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