Invention Grant
- Patent Title: Control apparatus, exposure apparatus, and method of manufacturing article
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Application No.: US16454500Application Date: 2019-06-27
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Publication No.: US10969698B2Publication Date: 2021-04-06
- Inventor: Takashi Kurihara
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JPJP2018-127798 20180704
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G05B19/19 ; G03B27/32 ; G05B11/32

Abstract:
The present invention provides a control apparatus for performing synchronous control to synchronize driving of a second moving member so as to follow driving of a first moving member, including a feedforward control system that includes a calculator configured to obtain an input/output response of the second moving member and position deviations of the first moving member and the second moving member while driving the first moving member and the second moving member in synchronism with each other, and calculate a feedforward manipulated variable based on the input/output response of the second moving member and the synchronous error between the first moving member and the second moving member obtained from the position deviations of the first moving member and the second moving member.
Public/Granted literature
- US20200012200A1 CONTROL APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING ARTICLE Public/Granted day:2020-01-09
Information query
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