Invention Grant
- Patent Title: Stack viabar structures
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Application No.: US16804710Application Date: 2020-02-28
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Publication No.: US10971356B2Publication Date: 2021-04-06
- Inventor: Su Chen Fan , Hsueh-Chung Chen , Yann Mignot , James J. Kelly , Terence B. Hook
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Fleit Intellectual Property Law
- Agent Jose Gutman
- Main IPC: H01L21/3213
- IPC: H01L21/3213 ; H01L21/02 ; H01L21/768 ; H01L25/07

Abstract:
Various methods and structures for fabricating a semiconductor structure. The semiconductor structure includes in a top layer of a semiconductor stack a semiconductor contact located according to a first horizontal pitch. A first metallization layer is disposed directly on the top layer and includes a metallization contact located according to a second horizontal pitch, the second horizontal pitch being different from the first horizontal pitch such that the location of the metallization contact is vertically mismatched from the location of the semiconductor contact. A second metallization layer is disposed directly on the first metallization layer. The second metallization layer includes a super viabar structure that forms an electrical interconnect, in the second metallization layer, between the semiconductor contact in the top layer of the semiconductor stack and the metallization contact in the first metallization layer.
Information query
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