Invention Grant
- Patent Title: Memory structure and manufacturing method thereof
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Application No.: US16424518Application Date: 2019-05-29
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Publication No.: US10971501B2Publication Date: 2021-04-06
- Inventor: Ying-Tsung Chu , Ching-Kang Chiu , Ching-Sung Ho
- Applicant: Powerchip Semiconductor Manufacturing Corporation
- Applicant Address: TW Hsinchu
- Assignee: Powerchip Semiconductor Manufacturing Corporation
- Current Assignee: Powerchip Semiconductor Manufacturing Corporation
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- Priority: TW108112991 20190415
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L21/223 ; H01L29/49 ; H01L29/66 ; H01L21/285 ; H01L21/28 ; H01L29/45

Abstract:
A memory structure including a substrate, a memory cell, and a transistor is provided. The substrate includes a memory cell region and a peripheral circuit region. The memory cell is located in the memory cell region. The transistor is located in the peripheral circuit region. The transistor includes a gate, a first doped region, a second doped region, a first nickel silicide layer, and a second nickel silicide layer. The gate is located on the substrate and is insulated from the substrate. The first doped region and the second doped region are located in the substrate on two sides of the gate. The first nickel silicide layer is located on an entire top surface of the first doped region, and the second nickel silicide layer is located on an entire top surface of the second doped region.
Public/Granted literature
- US20200328215A1 MEMORY STRUCTURE AND MANUFACTURING METHOD THEREOF Public/Granted day:2020-10-15
Information query
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