Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US16683056Application Date: 2019-11-13
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Publication No.: US10971509B2Publication Date: 2021-04-06
- Inventor: Jae Taek Kim
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Agency: William Park & Associates Ltd.
- Priority: KR10-2019-0080101 20190703
- Main IPC: H01L27/11556
- IPC: H01L27/11556 ; G11C5/02 ; H01L27/11582

Abstract:
A semiconductor memory device according to the present technology includes a stack body including a lower conductive pattern and an upper conductive pattern stacked apart from each other in a first direction, and at least one intermediate conductive pattern disposed between the lower conductive pattern and the upper conductive pattern, a contact plug connected to the lower conductive pattern and extending in the first direction, and at least one lower dummy plug overlapping the lower conductive pattern.
Public/Granted literature
- US20210005623A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2021-01-07
Information query
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