- Patent Title: GaN lateral vertical JFET with regrown channel and dielectric gate
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Application No.: US16705833Application Date: 2019-12-06
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Publication No.: US10971587B2Publication Date: 2021-04-06
- Inventor: Gangfeng Ye
- Applicant: Gangfeng Ye
- Applicant Address: US CA Fremont
- Assignee: Gangfeng Ye
- Current Assignee: Gangfeng Ye
- Current Assignee Address: US CA Fremont
- Agency: Imperium Patent Works
- Agent Helen Mao
- Main IPC: H01L29/20
- IPC: H01L29/20 ; H01L29/66 ; H01L29/10 ; H01L29/78 ; H01L29/808 ; H01L29/08 ; H01L29/417 ; H01L29/778

Abstract:
A vertical JFET is provided. The JFET is mixed with lateral channel structure and p-GaN gate structure. The JFET has a N+ implant source region. In one embodiment, a JFET is provided with a drain metal deposited over a backside of an N substrate, an n-type drift layer epitaxial grown over a topside of the N substrate, a buried P-type block layer deposited over the n-type drift layer, an implanted N+ source region on side walls of the lateral channel layer, and an source metal attached to the top of the p-layer and attached to the implanted N+ source region at the side. In one embodiment, the JFET further comprises a gate layer, and wherein the gate layer is a dielectric gate structure that enables a fully enhanced channel. In another embodiment, the gate layer is a p-type GaN gate structure that enables a partially enhanced channel.
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