Invention Grant
- Patent Title: Wavy channel flexible thin-film-transistor on a flexible substrate and method of producing such a thin-film-transistor
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Application No.: US16486107Application Date: 2018-01-12
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Publication No.: US10971603B2Publication Date: 2021-04-06
- Inventor: Amir Nabil Hanna , Muhammad Mustafa Hussain
- Applicant: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Applicant Address: SA Thuwal
- Assignee: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Current Assignee: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Current Assignee Address: SA Thuwal
- Agency: Patent Portfolio Builders PLLC
- International Application: PCT/IB2018/050207 WO 20180112
- International Announcement: WO2018/162993 WO 20180913
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/423 ; H01L29/786 ; H01L21/28 ; H01L21/3065
Abstract:
A method for producing a thin-film-transistor involves forming a flexible substrate on a rigid substrate, forming a plurality of fins and trenches in a structural layer arranged on the flexible substrate, forming a wavy gate layer, channel layer, source contact layer, and drain contact layer on each of the plurality of fins and each of a plurality of trenches of the structural layer, and removing the plurality of fins and trenches having the wavy gate, channel, source contact, and drain contact layers from the rigid substrate.
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Information query
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