Invention Grant
- Patent Title: Gate all around fin field effect transistor
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Application No.: US15839122Application Date: 2017-12-12
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Publication No.: US10971604B2Publication Date: 2021-04-06
- Inventor: Effendi Leobandung
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent L. Jeffrey Kelly
- Main IPC: H01L29/00
- IPC: H01L29/00 ; H01L29/66 ; H01L29/78 ; H01L29/10 ; H01L29/161 ; H01L29/786 ; H01L29/423

Abstract:
Semiconductor devices and methods of forming the same include forming a second dielectric layer on sidewalls of a channel region of a semiconductor fin. The semiconductor fin is surrounded at a fin base by a first dielectric layer. The first dielectric layer is recessed to form a gap in the channel region of the semiconductor fin between the first dielectric layer and the second dielectric layer. Material from the semiconductor fin is etched away at the gap to separate the semiconductor fin from an underlying surface in the channel region. A gate stack is formed in the channel region that completely encircles the semiconductor fin.
Public/Granted literature
- US20190181245A1 GATE ALL AROUND FIN FIELD EFFECT TRANSISTOR Public/Granted day:2019-06-13
Information query
IPC分类: