Invention Grant
- Patent Title: Method for producing a semiconductor arrangement
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Application No.: US16447207Application Date: 2019-06-20
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Publication No.: US10971620B2Publication Date: 2021-04-06
- Inventor: Joachim Weyers , Andreas Boehm , Anton Mauder , Patrick Schindler , Stefan Tegen , Armin Tilke , Uwe Wahl
- Applicant: Infineon Technologies Dresden GmbH & Co. KG
- Applicant Address: DE Dresden
- Assignee: Infineon Technologies Dresden GmbH & Co. KG
- Current Assignee: Infineon Technologies Dresden GmbH & Co. KG
- Current Assignee Address: DE Dresden
- Agency: Murphy, Bilak & Homiller, PLLC
- Priority: DE102018115326.0 20180626
- Main IPC: H01L29/78
- IPC: H01L29/78 ; G01K7/01 ; H01L23/34

Abstract:
A method includes partly removing a supporting layer arranged between a first semiconductor layer and a second semiconductor layer using an etching process to form at least one undercut between the first semiconductor layer and the second semiconductor layer, at least partly filling the at least one undercut with a first material having a higher thermal conductivity than the supporting layer, and forming a sensor device in or on the second semiconductor layer. Semiconductor arrangements and devices produced by the method are also described.
Public/Granted literature
- US20190393334A1 Method for Producing a Semiconductor Arrangement Public/Granted day:2019-12-26
Information query
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