Invention Grant
- Patent Title: Self-assembly patterning for fabricating thin-film devices
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Application No.: US16831593Application Date: 2020-03-26
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Publication No.: US10971640B2Publication Date: 2021-04-06
- Inventor: Patrick Reinhard , Adrian Chirila
- Applicant: FLISOM AG
- Applicant Address: CH Niederhasli
- Assignee: FLISOM AG
- Current Assignee: FLISOM AG
- Current Assignee Address: CH Niederhasli
- Agency: Patterson & Sheridan, LLP
- Priority: WOPCT/IB2016/050727 20160211
- Main IPC: H01L31/032
- IPC: H01L31/032 ; H01L31/18 ; B81C1/00 ; H01L21/02 ; H01L31/0352 ; H01L31/0392 ; H01L31/042

Abstract:
A method (200) for fabricating patterns on the surface of a layer of a device (100), the method comprising: providing at least one layer (130, 230); adding at least one alkali metal (235) comprising Cs and/or Rb; controlling the temperature (2300) of the at least one layer, thereby forming a plurality of self-assembled, regularly spaced, parallel lines of alkali compound embossings (1300, 1305) at the surface of the layer. The method further comprises forming cavities (236, 1300) by dissolving the alkali compound embossings. The method (200) is advantageous for nanopatterning of devices (100) without using templates and for the production of high efficiency optoelectronic thin-film devices (100).
Public/Granted literature
- US20200227575A1 SELF-ASSEMBLY PATTERNING FOR FABRICATING THIN-FILM DEVICES Public/Granted day:2020-07-16
Information query
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