Invention Grant
- Patent Title: Piezoelectric element, piezoelectric device, ultrasonic probe and electronic apparatus
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Application No.: US15935539Application Date: 2018-03-26
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Publication No.: US10971673B2Publication Date: 2021-04-06
- Inventor: Koji Ohashi , Takahiro Kamijo , Katsuhiro Imai , Takumi Yamaoka , Chikara Kojima
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JPJP2017-061440 20170327
- Main IPC: H01L41/047
- IPC: H01L41/047 ; H01L41/053 ; H01L41/187 ; H01L41/09 ; H01L41/29 ; B06B1/06 ; G01N29/24 ; A61B8/12 ; A61B8/06 ; B06B1/02 ; B41J2/14

Abstract:
A piezoelectric element has a first electrode layer, a piezoelectric layer on the first electrode layer, a second electrode layer on the piezoelectric layer, a third electrode layer on part of the second electrode layer and including third metal, and an insulating layer covering at least a part of the piezoelectric layer not provided with the second electrode layer and having an aperture exposing a part of the second electrode layer. The second electrode layer has a first layer including first metal and a second layer including second metal on the first layer. The second layer is exposed in the aperture. A difference in standard redox potential between the second metal and the third metal is smaller than a difference in standard redox potential between the first metal and the third metal.
Public/Granted literature
- US20180277738A1 Piezoelectric Element, Piezoelectric Device, Ultrasonic Probe And Electronic Apparatus Public/Granted day:2018-09-27
Information query
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