Invention Grant
- Patent Title: Dynamic quantity measuring apparatus having a strain sensor disposed in a groove
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Application No.: US15761732Application Date: 2016-07-29
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Publication No.: US10976205B2Publication Date: 2021-04-13
- Inventor: Kisho Ashida , Atsuo Soma
- Applicant: Hitachi Automotive Systems, Ltd.
- Applicant Address: JP Hitachinaka
- Assignee: Hitachi Automotive Systems, Ltd.
- Current Assignee: Hitachi Automotive Systems, Ltd.
- Current Assignee Address: JP Hitachinaka
- Agency: Crowell & Moring LLP
- Priority: JPJP2015-192517 20150930
- International Application: PCT/JP2016/072253 WO 20160729
- International Announcement: WO2017/056673 WO 20170406
- Main IPC: G01L1/18
- IPC: G01L1/18 ; G01L9/00 ; G01B7/16

Abstract:
A dynamic quantity measuring apparatus includes a strain sensor, a resin member, a strain body, and a boding portion. The strain sensor has a plurality of piezoresistance elements and a plurality of electrode pads formed on a surface of a semiconductor substrate. The resin member for electrical wiring is provided with a plurality of wires electrically connected to the plurality of electrode pads. The strain body is joined to a back surface of the strain sensor. The bonding portion is configured to bond the resin member for electrical wiring to the strain body. A groove is provided in a region of the resin member for electrical wiring located in a vicinity of the strain sensor.
Public/Granted literature
- US20180356302A1 Dynamic Quantity Measuring Apparatus Public/Granted day:2018-12-13
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