Invention Grant

Particle detector
Abstract:
A particle detector for detecting nano-particles contained in fluid is provided. The particle detector includes a substrate and at least one pair of sensing electrodes disposed on the substrate. The substrate includes nano-pores, wherein the pore size of the nano-pores is greater than the particle size of the nano-particles, allowing the nano-particles contained in the fluid passing through the nano-pores. The at least one pair of sensing electrodes are positioned adjacent to at least one of the nano-pores.
Public/Granted literature
Information query
Patent Agency Ranking
0/0