Invention Grant
- Patent Title: Particle detector
-
Application No.: US16103934Application Date: 2018-08-15
-
Publication No.: US10976233B2Publication Date: 2021-04-13
- Inventor: En-Tian Lin , Chwen Yu , Mei Lee , Shu-Yu Hsu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- Main IPC: G01N15/12
- IPC: G01N15/12 ; G01R27/00 ; H01L21/67 ; G01N15/00

Abstract:
A particle detector for detecting nano-particles contained in fluid is provided. The particle detector includes a substrate and at least one pair of sensing electrodes disposed on the substrate. The substrate includes nano-pores, wherein the pore size of the nano-pores is greater than the particle size of the nano-particles, allowing the nano-particles contained in the fluid passing through the nano-pores. The at least one pair of sensing electrodes are positioned adjacent to at least one of the nano-pores.
Public/Granted literature
- US20200056978A1 Particle detector Public/Granted day:2020-02-20
Information query