Invention Grant
- Patent Title: Physical quantity sensor, inertial measurement unit, electronic apparatus, and vehicle
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Application No.: US16059204Application Date: 2018-08-09
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Publication No.: US10976339B2Publication Date: 2021-04-13
- Inventor: Yoshinao Yanagisawa
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JPJP2017-155110 20170810
- Main IPC: G01P1/02
- IPC: G01P1/02 ; G01P15/125 ; G01L1/14 ; G01P15/08 ; G01P15/18 ; G01C19/5663 ; G01D5/24

Abstract:
A physical quantity sensor includes: a container that includes a storage space and a bottom plate that configures an inner bottom surface of the storage space; a sensor element that is attached to the inner bottom surface; a circuit element that is attached to a surface of the sensor element on the opposite side of the inner bottom surface, and is electrically connected with the sensor element; and a ground plane that is provided on the bottom plate. The ground GND plane is provided apart from the inner bottom surface.
Public/Granted literature
- US20190049484A1 Physical Quantity Sensor, Inertial Measurement Unit, Electronic Apparatus, And Vehicle Public/Granted day:2019-02-14
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