Physical quantity sensor, inertial measurement unit, electronic apparatus, and vehicle
Abstract:
A physical quantity sensor includes: a container that includes a storage space and a bottom plate that configures an inner bottom surface of the storage space; a sensor element that is attached to the inner bottom surface; a circuit element that is attached to a surface of the sensor element on the opposite side of the inner bottom surface, and is electrically connected with the sensor element; and a ground plane that is provided on the bottom plate. The ground GND plane is provided apart from the inner bottom surface.
Information query
Patent Agency Ranking
0/0