Optical imaging equipment and method
Abstract:
An optical imaging equipment and method. The optical imaging equipment includes an optical microscope, an objective table, a light source module and an objective lens. The objective table is movable in the XY-plane, the light source module contains illumination light sources, and the objective lens is movable in the Z-axis direction; a three dimensions (3D) electric sample table is fixed on the objective table, which is used for carrying a sample to be tested and driving the sample to move in 3D directions relative to the objective table; a microsphere is fixed on a transparent substrate; the objective lens, the microsphere and the sample to be tested are arranged in the Z-axis direction in sequence, wherein, the transparent substrate along with the microsphere thereon can be moved to a first position and remain stationary relative to the objective table in the Z-axis direction, the 3D electric sample table can adjust the sample to be tested with respect to the microsphere to an imaging plane which is parallel to the XY-plane and a first image is formed by the microsphere, the objective lens can be adjusted to a second position so that the objective lens can perform a secondary imaging of the first image to form a second image.
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