Invention Grant
- Patent Title: Positive working photosensitive material
-
Application No.: US16079711Application Date: 2017-04-18
-
Publication No.: US10976662B2Publication Date: 2021-04-13
- Inventor: Weihong Liu , PingHung Lu , Chunwei Chen , SookMee Lai , Yoshiharu Sakurai , Aritaka Hishida
- Applicant: AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.À R.L.
- Applicant Address: LU Luxembourg
- Assignee: AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.À R.L.
- Current Assignee: AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.À R.L.
- Current Assignee Address: LU Luxembourg
- Agent Francis M. Houlihan
- International Application: PCT/EP2017/059128 WO 20170418
- International Announcement: WO2017/182441 WO 20171026
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/039 ; C08K5/378 ; C08L53/00 ; C08L61/06 ; G03F7/023

Abstract:
The present application for patent relates to a light-sensitive positive working photosensitive composition especially useful for imaging thick films using a composition which gives very good film uniformity and promotes a good process latitude against feature pattern collapse in patterns created upon imaging and developing of these films.
Public/Granted literature
- US20190064662A1 POSITIVE WORKING PHOTOSENSITIVE MATERIAL Public/Granted day:2019-02-28
Information query
IPC分类: