Invention Grant
- Patent Title: Integrated device and method of forming the same
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Application No.: US16870386Application Date: 2020-05-08
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Publication No.: US10977415B2Publication Date: 2021-04-13
- Inventor: Hiranmay Biswas , Kuo-Nan Yang , Chung-Hsing Wang , Meng-Xiang Lee
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee Address: TW Hsinchu
- Agency: WPAT, P.C., Intellectual Property Attorneys
- Agent Anthony King
- Main IPC: G06F30/394
- IPC: G06F30/394 ; H01L23/528 ; H01L27/02 ; H01L27/118 ; G06F111/04 ; G06F111/20 ; G06F119/18

Abstract:
A method for forming an integrated device includes following operations. It is provided a first circuit having a first connecting path in a metal line layer, a second connecting path, and a third connecting path. The second connecting path is electrically connected to a first connecting portion of the first connecting path in the metal line layer. The third connecting path is electrically coupled to a second connecting portion of the first connecting path in the metal line layer. An electromigration (EM) data of the first connecting path is analyzed to determine if a third connecting portion in the metal line layer between the first connecting portion and the second connecting portion induces EM phenomenon. The first circuit is modified to generate a second circuit when the third connecting portion induces EM phenomenon. The integrated device is generated according to the second circuit.
Public/Granted literature
- US20200272782A1 INTEGRATED DEVICE AND METHOD OF FORMING THE SAME Public/Granted day:2020-08-27
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