Invention Grant
- Patent Title: Thin-film transistor-based pressure sensor and method of manufacturing same
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Application No.: US16364566Application Date: 2019-03-26
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Publication No.: US10978595B2Publication Date: 2021-04-13
- Inventor: Sanghoon Baek , Sungjune Jung , Jimin Kwon , Geunyeol Bae , Kilwon Cho
- Applicant: CENTER FOR ADVANCED SOFT ELECTRONICS
- Applicant Address: KR Pohang-si
- Assignee: CENTER FOR ADVANCED SOFT ELECTRONICS
- Current Assignee: CENTER FOR ADVANCED SOFT ELECTRONICS
- Current Assignee Address: KR Pohang-si
- Agency: STIP Law Group, LLC
- Priority: KR10-2018-0036672 20180329
- Main IPC: H01L29/84
- IPC: H01L29/84 ; H01L29/786 ; H01L51/00 ; H01L51/05

Abstract:
Disclosed is a thin-film transistor-based pressure sensor including a gate electrode; a gate dielectric layer provided on the gate electrode; a semiconductor layer provided on the gate dielectric layer; and a source electrode and a drain electrode provided on the semiconductor layer, wherein each of the source and drain electrodes has an elastic body that includes: an elastic part having a protrusion; and a conductive part provided on a surface of the elastic part and having a conductive material. According to the pressure sensor and a method of manufacturing the same of the present invention, the elastic body coated with the conductive material is patterned to serve as the source electrode and the drain electrode of the pressure sensor whereby it is possible to drive an active matrix, drive the pressure sensor with low power, and manufacture the pressure sensor through a simple process.
Public/Granted literature
- US20190305139A1 THIN-FILM TRANSISTOR-BASED PRESSURE SENSOR AND METHOD OF MANUFACTURING SAME Public/Granted day:2019-10-03
Information query
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