Invention Grant
- Patent Title: Nitride semiconductor light-emitting element and method of manufacturing the same
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Application No.: US16556162Application Date: 2019-08-29
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Publication No.: US10978610B2Publication Date: 2021-04-13
- Inventor: Takuya Okada
- Applicant: NICHIA CORPORATION
- Applicant Address: JP Anan
- Assignee: NICHIA CORPORATION
- Current Assignee: NICHIA CORPORATION
- Current Assignee Address: JP Anan
- Agency: Foley & Lardner LLP
- Priority: JPJP2018-162959 20180831
- Main IPC: H01L33/00
- IPC: H01L33/00 ; H01L33/32 ; H01L29/15 ; H01L33/06

Abstract:
A method of manufacturing a nitride semiconductor light-emitting element includes growing an n-side semiconductor layer, an active layer, and a p-side semiconductor layer. The step of growing the active layer includes growing a first barrier layer before growing a well layer. The step of growing the first barrier layer includes a first stage where a first nitride semiconductor layer containing In is grown with a first concentration of n-type impurity, a second stage where a second nitride semiconductor layer containing In is grown with a second concentration of n-type impurity higher than the first concentration, a third stage where a third nitride semiconductor layer containing In is grown with a third concentration of n-type impurity lower than the second concentration, and a fourth stage where a fourth nitride semiconductor layer is grown under a growth condition in which an amount of an impurity source gas is decreased or stopped.
Public/Granted literature
- US20200075795A1 NITRIDE SEMICONDUCTOR LIGHT-EMITTING ELEMENT AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2020-03-05
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