Invention Grant
- Patent Title: MEMS device comprising a membrane and an actuator
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Application No.: US16752321Application Date: 2020-01-24
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Publication No.: US10981778B2Publication Date: 2021-04-20
- Inventor: Dario Paci , Domenico Giusti , Irene Martini
- Applicant: STMicroelectronics S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.R.L.
- Current Assignee: STMicroelectronics S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group LLP
- Priority: IT102017000091226 20170807
- Main IPC: B81B3/00
- IPC: B81B3/00 ; H04N5/232 ; H04N5/225 ; B81B7/02

Abstract:
A MEMS device includes a semiconductor support body having a first cavity, a membrane including a peripheral portion, fixed to the support body, and a suspended portion. A first deformable structure is at a distance from a central part of the suspended portion of the membrane and a second deformable structure is laterally offset relative to the first deformable structure towards the peripheral portion of the membrane. A projecting region is fixed under the membrane. The second deformable structure is deformable so as to translate the central part of the suspended portion of the membrane along a first direction, and the first deformable structure is deformable so as to translate the central part of the suspended portion of the membrane along a second direction.
Public/Granted literature
- US20200156929A1 MEMS DEVICE COMPRISING A MEMBRANE AND AN ACTUATOR Public/Granted day:2020-05-21
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