Invention Grant
- Patent Title: Method of forming an apparatus comprising perovskite
-
Application No.: US16308884Application Date: 2017-06-14
-
Publication No.: US10985319B2Publication Date: 2021-04-20
- Inventor: Alexander Bessonov
- Applicant: EMBERION OY
- Applicant Address: FI Espoo
- Assignee: EMBERION OY
- Current Assignee: EMBERION OY
- Current Assignee Address: FI Espoo
- Agency: Squire Patton Boggs (US) LLP
- Priority: EP16174531 20160615
- International Application: PCT/FI2017/050440 WO 20170614
- International Announcement: WO2017/216423 WO 20171221
- Main IPC: H01L51/42
- IPC: H01L51/42 ; H01L51/00 ; G03F1/42 ; G03F7/16 ; G03F7/20 ; H01G9/00 ; H01G9/20 ; H01L51/50 ; H01L51/52

Abstract:
A method comprising: providing a substrate comprising one or more electronic structures; providing a layer of perovskite overlaying the one or more electronic structures; coating a layer of photoresist material overlaying the layer of perovskite; aligning a mask with the one or more electronic structures and patterning the photoresist material; and using the same etchant to remove sections of the patterned photoresist material and the perovskite underneath the sections of the photoresist material.
Public/Granted literature
- US20200313091A1 A METHOD OF FORMING AN APPARATUS COMPRISING PEROVSKITE Public/Granted day:2020-10-01
Information query
IPC分类: