Invention Grant
- Patent Title: Curable composition for imprinting, cured product, pattern forming method, and lithography method
-
Application No.: US16261884Application Date: 2019-01-30
-
Publication No.: US10990011B2Publication Date: 2021-04-27
- Inventor: Yuichiro Goto
- Applicant: FUJIFILM Corporation
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JPJP2016-151554 20160801
- Main IPC: G03F7/00
- IPC: G03F7/00 ; C08F220/20 ; G03F7/031 ; G03F7/075 ; C08F2/50 ; G03F7/027 ; H01L21/027 ; B29C59/02 ; C08F222/10 ; C07F7/18 ; C07F9/53

Abstract:
Provided are a curable composition for imprinting and a cured product, a pattern forming method, and a lithography method in which the curable composition for imprinting is used, the curable composition having excellent resolution ability, filling properties into a mold, and releasability from a mold in a case where a fine pattern having a size of 20 nm or less is prepared. The curable composition for imprinting includes: a monofunctional polymerizable compound; a bifunctional polymerizable compound; and a photopolymerization initiator, in which a content of the monofunctional polymerizable compound is 5 to 30 mass % with respect to a content of all the polymerizable compounds, a content of the bifunctional polymerizable compound is 70 mass % or higher with respect to a content of all the polymerizable compounds, at least one bifunctional polymerizable compound is a bifunctional polymerizable compound in which the number of atoms linking two polymerizable groups to each other is 2 or less, and a content of a bifunctional polymerizable compound that does not include an alicyclic structure and an aromatic ring structure and in which the number of atoms linking two polymerizable groups to each other is 3 or more is 30 mass % or lower with respect to the content of all the polymerizable compounds.
Public/Granted literature
- US20190163059A1 CURABLE COMPOSITION FOR IMPRINTING, CURED PRODUCT, PATTERN FORMING METHOD, AND LITHOGRAPHY METHOD Public/Granted day:2019-05-30
Information query