Invention Grant
- Patent Title: Method of reducing photoelectron yield and/or secondary electron yield of a ceramic surface; corresponding apparatus and product
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Application No.: US16082163Application Date: 2017-03-08
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Publication No.: US10994369B2Publication Date: 2021-05-04
- Inventor: Amin Abdolvand
- Applicant: University of Dundee
- Applicant Address: GB Dundee
- Assignee: University of Dundee
- Current Assignee: University of Dundee
- Current Assignee Address: GB Dundee
- Agency: Myers Bigel, P.A
- Priority: GB1603991 20160308
- International Application: PCT/GB2017/050621 WO 20170308
- International Announcement: WO2017/153750 WO 20170914
- Main IPC: B23K26/352
- IPC: B23K26/352 ; B23K26/362 ; B23K26/36 ; B23K26/06 ; B23K26/0622 ; B23K26/00 ; B23K26/082 ; B23K26/04 ; B23K26/40 ; H01L21/768 ; H01L23/525 ; B23K101/36 ; B23K103/00 ; B23K103/14 ; B23K103/10 ; B23K103/04 ; B23K103/12 ; B23K101/32
Abstract:
A method of reducing photoelectron yield (PEY) and/or secondary electron yield (SEY) of a ceramic surface comprises applying pulsed laser radiation comprising a series of laser pulses emitted by a laser (4) to the surface of a target (10) to produce a periodic arrangement of structures on the surface of the target (10).
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