Invention Grant
- Patent Title: Self-organized film-forming composition for use in forming a micro-phase-separated pattern
-
Application No.: US16478018Application Date: 2018-01-16
-
Publication No.: US10995172B2Publication Date: 2021-05-04
- Inventor: Ryuta Mizuochi , Yasunobu Someya , Hiroyuki Wakayama , Rikimaru Sakamoto
- Applicant: NISSAN CHEMICAL CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NISSAN CHEMICAL CORPORATION
- Current Assignee: NISSAN CHEMICAL CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JPJP2017-007148 20170119
- International Application: PCT/JP2018/000904 WO 20180116
- International Announcement: WO2018/135456 WO 20180726
- Main IPC: B05D5/00
- IPC: B05D5/00 ; H01L21/027 ; C08F293/00 ; B05D3/00 ; C08F299/02

Abstract:
A self-assembled film-forming composition for orthogonally inducing, with respect to a substrate, a microphase separation structure in a layer including a block copolymer, in the whole surface of a coating film, even at high heating temperatures at which arrangement failure of the microphase separation of the block copolymer occurs. The self-assembled film-forming composition includes a block copolymer, and at least two solvents having different boiling points as a solvent. The block copolymer is obtained by bonding: a non-silicon-containing polymer having, as a structural unit, styrene, a derivative thereof, or a structure derived from a lactide; and a silicon-containing polymer having, as a structural unit, styrene substituted with silicon-containing groups. The solvent includes: a low boiling point solvent (A) having a boiling point of 160° C. or lower; and a high boiling point solvent (B) having a boiling point of 170° C. or higher.
Information query