Invention Grant
- Patent Title: Neutral to alkaline chemical mechanical polishing compositions and methods for tungsten
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Application No.: US16026175Application Date: 2018-07-03
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Publication No.: US10995238B2Publication Date: 2021-05-04
- Inventor: Yi Guo , Tony Quan Tran
- Applicant: Rohm and Haas Electronic Materials CMP Holdings, Inc.
- Applicant Address: US DE Newark
- Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.
- Current Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.
- Current Assignee Address: US DE Newark
- Agent John J. Piskorski
- Main IPC: C09G1/02
- IPC: C09G1/02 ; B24B37/04 ; C23F1/00 ; H01L21/321 ; C23F1/44

Abstract:
A neutral to alkaline chemical mechanical composition for polishing tungsten includes, as initial components: water; an oxidizing agent selected from an iodate compound, a periodate compound and mixtures thereof; colloidal silica abrasive particles including a nitrogen-containing compound; optionally, a pH adjusting agent; and, optionally, a biocide. The chemical mechanical polishing method includes providing a chemical mechanical polishing pad, having a polishing surface; creating dynamic contact at an interface between the polishing pad and the substrate; and dispensing the neutral to alkaline chemical mechanical polishing composition onto the polishing surface at or near the interface between the polishing pad and the substrate; wherein some of the tungsten is polished away from the substrate and, further, to at least inhibit static etch of the tungsten.
Public/Granted literature
- US20200010726A1 NEUTRAL TO ALKALINE CHEMICAL MECHANICAL POLISHING COMPOSITIONS AND METHODS FOR TUNGSTEN Public/Granted day:2020-01-09
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