Invention Grant
- Patent Title: Surface treating apparatus and surface treatment method
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Application No.: US16727302Application Date: 2019-12-26
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Publication No.: US10995407B2Publication Date: 2021-05-04
- Inventor: Masayuki Utsumi , Masaharu Takeuchi
- Applicant: C. Uyemura & Co., Ltd.
- Applicant Address: JP Osaka
- Assignee: C. Uyemura & Co., Ltd.
- Current Assignee: C. Uyemura & Co., Ltd.
- Current Assignee Address: JP Osaka
- Agency: Sheridan Ross, PC
- Agent Jason H. Vick
- Priority: JPJP2019-002863 20190110
- Main IPC: C23C18/16
- IPC: C23C18/16 ; C23C18/18 ; B05C5/00 ; B05C5/02

Abstract:
In a flow down type surface treating apparatus, a scattering amount of a processing solution Q is reduced.
A honeycomb member 60 is provided vertically below a transport hanger 16. The honeycomb member 60 consists of a plurality of tubular members with hexagonal holes connected together. When the processing solution Q falls in a vertical direction (in the direction of an arrow α), the processing solution Q passes through through-holes of the honeycomb member 60. When the processing solution Q hits liquid level H, a part of it is reflected. Since a part of the reflected processing solution Q is reflected obliquely, it collides with an inner wall of the through-hole of the honeycomb member 60. As a result, the amount of the treatment liquid Q that emerges again on an upper surface of the through-holes is reduced. Thereby, the honeycomb member 60 exhibits a scattering prevention function.
A honeycomb member 60 is provided vertically below a transport hanger 16. The honeycomb member 60 consists of a plurality of tubular members with hexagonal holes connected together. When the processing solution Q falls in a vertical direction (in the direction of an arrow α), the processing solution Q passes through through-holes of the honeycomb member 60. When the processing solution Q hits liquid level H, a part of it is reflected. Since a part of the reflected processing solution Q is reflected obliquely, it collides with an inner wall of the through-hole of the honeycomb member 60. As a result, the amount of the treatment liquid Q that emerges again on an upper surface of the through-holes is reduced. Thereby, the honeycomb member 60 exhibits a scattering prevention function.
Public/Granted literature
- US20200224314A1 SURFACE TREATING APPARATUS AND SURFACE TREATMENT METHOD Public/Granted day:2020-07-16
Information query
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