Invention Grant
- Patent Title: Sample preparation method and sample preparing apparatus
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Application No.: US16105092Application Date: 2018-08-20
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Publication No.: US10996147B2Publication Date: 2021-05-04
- Inventor: Ichiro Sase
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Main IPC: G01N1/30
- IPC: G01N1/30 ; G01N1/44 ; G01N23/225 ; G01N23/04 ; H01J37/20 ; G02B21/36 ; G02B21/00 ; G02B21/06 ; G01N1/42 ; C12M1/12 ; G01N21/64

Abstract:
A sample preparation method includes: irradiating a first region of a sample with light at a time t1; irradiating a second region different from the first region with the tight at a time t2 after the time t1; and fixing the sample at a time t3 after the time t2. A sample preparing apparatus includes: a light radiating unit that irradiates a first region of a sample with light at time t1 and irradiates a second region different from the first region with the light at a time t2 after the time t1; and a fixing unit that fixes the sample at a time t3 after the time t2.
Public/Granted literature
- US20180356321A1 SAMPLE PREPARATION METHOD AND SAMPLE PREPARING APPARATUS Public/Granted day:2018-12-13
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