Invention Grant
- Patent Title: Method of positioning probe tips relative to pads
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Application No.: US16872390Application Date: 2020-05-12
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Publication No.: US10996239B1Publication Date: 2021-05-04
- Inventor: Ingo Berg , Chien-Hung Chen , Frank Fehrmann , Sebastian Giessmann
- Applicant: MPI Corporation
- Applicant Address: TW Hsinchu County
- Assignee: MPI Corporation
- Current Assignee: MPI Corporation
- Current Assignee Address: TW Hsinchu County
- Agency: CKC & Partners Co., LLC
- Main IPC: G01Q20/02
- IPC: G01Q20/02 ; G01Q70/06

Abstract:
A method of positioning probe tips relative to pads includes: focusing on each of the probe tips in a first image as viewed by a microscope and collecting the coordinates of the corresponding probe tip relative to a first reference point in the first image; focusing on each of the pads in a second image as viewed by the microscope and collecting the coordinates of the corresponding pad relative to a second reference point in the second image, a relative position of the second reference point to the first reference point being predetermined; matching the pads with the probe tips when the quantity of the probe tips and the pads are equal while minimizing a maximum value of the distances calculated between each of the probe tips and the corresponding pad; and moving the probe tips to touch the pads with the maximum value minimized.
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