Invention Grant
- Patent Title: Probe card board, probe card, and inspection apparatus
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Application No.: US16345965Application Date: 2017-10-30
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Publication No.: US10996241B2Publication Date: 2021-05-04
- Inventor: Tomohiro Imai
- Applicant: KYOCERA Corporation
- Applicant Address: JP Kyoto
- Assignee: KYOCERA Corporation
- Current Assignee: KYOCERA Corporation
- Current Assignee Address: JP Kyoto
- Agency: Procopio Cory Hargreaves and Savitch LLP
- Priority: JPJP2016-212582 20161031
- International Application: PCT/JP2017/039183 WO 20171030
- International Announcement: WO2018/079788 WO 20180503
- Main IPC: G01R1/073
- IPC: G01R1/073 ; C04B35/587 ; C04B35/626 ; C04B35/64 ; G01R31/28

Abstract:
A probe card board in the present disclosure includes a plurality of through holes designed to receive a probe brought into contact with a measurement object. The probe card board is composed of silicon nitride based ceramics. The probe card board includes a first surface opposed to the measurement object and a second surface located opposite to the first surface. The probe card board contains a plurality of crystal phases of metal silicide. Metal constituting the metal silicide is at least one kind selected from among molybdenum, chrome, iron, nickel, manganese, vanadium, niobium, tantalum, cobalt and tungsten.
Public/Granted literature
- US20200064375A1 PROBE CARD BOARD, PROBE CARD, AND INSPECTION APPARATUS Public/Granted day:2020-02-27
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