Invention Grant
- Patent Title: Probe card and test apparatus including the same
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Application No.: US15615084Application Date: 2017-06-06
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Publication No.: US10996242B2Publication Date: 2021-05-04
- Inventor: Gyu-Yeol Kim , Shin-Ho Kang
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2016-0166205 20161207
- Main IPC: G01R1/073
- IPC: G01R1/073 ; G01R35/00

Abstract:
A probe card, for testing an electrical characteristic of a device under test (DUT) including a plurality of semiconductor devices, includes a substrate, a first probe pin disposed on a surface of the substrate and including a tip portion capable of contacting a pad of the DUT, and a second probe pin disposed on the surface of the substrate and including a tip portion capable of contacting the pad of the DUT. The first probe pin protrudes further than the second probe pin protrudes from the surface of the substrate in a first direction that is substantially perpendicular to the surface of the substrate.
Public/Granted literature
- US20180156842A1 PROBE CARD AND TEST APPARATUS INCLUDING THE SAME Public/Granted day:2018-06-07
Information query