Invention Grant
- Patent Title: X-ray signal processor and x-ray spectrometer
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Application No.: US16697200Application Date: 2019-11-27
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Publication No.: US10996349B2Publication Date: 2021-05-04
- Inventor: Tsutomu Tada
- Applicant: Rigaku Corporation
- Applicant Address: JP Akishima
- Assignee: Rigaku Corporation
- Current Assignee: Rigaku Corporation
- Current Assignee Address: JP Akishima
- Agency: HEA Law PLLC
- Priority: JPJP2018-221141 20181127
- Main IPC: G01T1/24
- IPC: G01T1/24 ; A61B6/00

Abstract:
Provided is an X-ray signal processor and an X-ray spectrometer that are configured to measure X-rays and, at the same time, accurately detect, with a simple method, the degree of performance degradation of a semiconductor detector. The X-ray signal processor includes: a semiconductor detector configured to generate a charge corresponding to energy of detected X-rays; a preamplifier configured to output a ramp voltage signal corresponding to the generated charge; a counter configured to count the X-rays for each voltage change amount due to the charge based on the ramp voltage signal; and a judgment part configured to determine whether the semiconductor detector has been degraded based on a first voltage change evaluation value corresponding to a total sum of products of the voltage change amount and an occurrence frequency thereof, and a second voltage change evaluation value corresponding to an increase amount of the ramp voltage signal.
Public/Granted literature
- US20200166657A1 X-RAY SIGNAL PROCESSOR AND X-RAY SPECTROMETER Public/Granted day:2020-05-28
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