Invention Grant
- Patent Title: Light beam diffuser system and method
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Application No.: US16613308Application Date: 2018-05-15
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Publication No.: US10996381B2Publication Date: 2021-05-04
- Inventor: Adrianus Johannes Verneer , Mikhail Yurlevitch Loktev , Derk Andre Kort
- Applicant: Kulicke & Soffa Liteq B.V.
- Applicant Address: NL Eindhoven
- Assignee: Kulicke & Soffa Liteq B.V.
- Current Assignee: Kulicke & Soffa Liteq B.V.
- Current Assignee Address: NL Eindhoven
- Agent Christopher M. Spletzer, Sr.
- Priority: NL2018926 20170516
- International Application: PCT/NL2018/050318 WO 20180515
- International Announcement: WO2018/212646 WO 20181122
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G02B5/02

Abstract:
A diffuser system (100) and method for optically diffusing a light beam (L1,L2). At least two transmissive diffuser windows (11,21) are provided. The diffuser windows (11,21) are arranged to sequentially diffuse the light beam (L1,L2) transmitted there through. The diffuser system (100) is configured to continuously rotate the diffuser windows (11,21) at an angular velocity (ω1,ω2) for homogenizing a diffusive pattern of the transmitted light beam (L1,L2). The diffuser windows (11,21) are configured to rotate around distinct rotation axes (C1,C2). The distinct rotation axes (C1,C2) are parallel and offset with respect to each other by a radial center distance (d12). A rotating subarea of the first diffuser window (11) partially overlaps a rotating subarea of the second rotating diffuser window (12) The partially overlapping rotating subareas define a beam window (W12) for homogenizing and diffusing the transmitted light beam (L1,L2).
Public/Granted literature
- US20200150318A1 LIGHT BEAM DIFFUSER SYSTEM AND METHOD Public/Granted day:2020-05-14
Information query
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