Invention Grant
- Patent Title: Protective wafer including inclined optical windows and device
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Application No.: US16776593Application Date: 2020-01-30
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Publication No.: US10996461B2Publication Date: 2021-05-04
- Inventor: Stefan Pinter
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: DE102016221038.6 20161026
- Main IPC: G02B27/00
- IPC: G02B27/00 ; B81C1/00 ; B81B7/00 ; G02B26/08

Abstract:
A method for manufacturing a protective wafer including a frame wafer and an optical window, and to a method for manufacturing a micromechanical device including such a protective wafer having an inclined optical window. Also described are a protective wafer including a frame wafer and an optical window, and a micromechanical device including a MEMS wafer and such a protective wafer, which delimit a cavity, the protective wafer including an inclined optical window.
Public/Granted literature
- US20200166743A1 METHOD FOR MANUFACTURING A PROTECTIVE WAFER INCLUDING INCLINED OPTICAL WINDOWS AND DEVICE Public/Granted day:2020-05-28
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