Manufacturing equipment diagnosis support system
Abstract:
A manufacturing equipment diagnosis support system includes: a data collector which collects and records respective data in plural apparatuses to be monitored provided in manufacturing equipment; a data analysis device; and a display. The data analysis device includes: a data analysis range setting unit which sets an analysis range of data, by an item of data and time period; a data grouping unit which classifies the data into a category based on specification and use condition of the apparatus to be monitored, and a category based on a physical quantity which the data shows, to group the data; a feature extracting unit which extracts a feature in each of the data items; an unusual phenomenon specifying unit which specifies an unusual phenomenon candidate item; and a testing unit which tests whether there is a significant difference or not between the unusual phenomenon candidate item and an other data item.
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