Invention Grant
- Patent Title: Flow rate ratio control device with flow velocity control mode
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Application No.: US16332171Application Date: 2017-08-25
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Publication No.: US10996689B2Publication Date: 2021-05-04
- Inventor: Tadahiro Yasuda , Patrick Allen Lowery , William Wylie White , Brian James Ebert , Maximilian Martin Gundlach , John Thomas Dick
- Applicant: HORIBA STEC, Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: HORIBA STEC, Co., Ltd.
- Current Assignee: HORIBA STEC, Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Alleman Hall Creasman & Tuttle LLP
- Priority: JPJP2016-177752 20160912
- International Application: PCT/JP2017/030637 WO 20170825
- International Announcement: WO2018/047644 WO 20180315
- Main IPC: G05D7/06
- IPC: G05D7/06 ; G01F1/48 ; G01F1/00 ; G05D11/13

Abstract:
A flow rate ratio control device is provided with a main flow path, a plurality of branch flow paths that branch off from a terminus of the main flow path, a plurality of fluid control devices that are provided respectively on each branch flow path, and that are each equipped with a valve and a pressure-based flow rate sensor that is disposed downstream of the valve, and an operation setting unit that establishes settings such that, based on the target flow rate ratio, any one fluid control device from among the plurality of fluid control devices is made to operate in a flow velocity control mode in which the flow velocity of a fluid is controlled upstream of each valve, and the remaining fluid control devices are made to operate in a flow rate control mode in which the flow rate is controlled based on the target flow rates.
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