Three-dimensional-shape measurement device, three-dimensional-shape measurement method, and program
Abstract:
A control device acquires a plurality of observation signals observed using a plurality of projection patterns having different spatial frequencies, as observation signals for a measurement point on a measurement object. The control device repeatedly executes processing for estimating two component signals included in each observation signal, so as to separate the observation signal into two component signals, and calculate a three-dimensional position of the measurement point based on the phases of the separated component signals.
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