Invention Grant
- Patent Title: Memory cells with tunneling materials including lanthanum oxide
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Application No.: US16539058Application Date: 2019-08-13
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Publication No.: US10998042B2Publication Date: 2021-05-04
- Inventor: Arup Bhattacharyya
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Brooks, Cameron & Huebsch, PLLC
- Main IPC: G11C11/56
- IPC: G11C11/56 ; H01L29/792 ; H01L29/51 ; H01L29/49 ; G11C16/10 ; G11C16/14 ; G11C16/04

Abstract:
An example apparatus includes a semiconductor material, a tunneling material formed on the semiconductor material, a charge trapping material formed on the tunneling material, a charge blocking material formed on the charge trapping material, and a metal gate formed on the charge blocking material. The charge trapping material comprises gallium nitride (GaN), and the memory cell is programmed to the target state via the multi-mechanism charge transport such that charges are simultaneously transported to the charge trapping material through a plurality of different channels.
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