Invention Grant
- Patent Title: Image sensor with shallow trench edge doping
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Application No.: US16815296Application Date: 2020-03-11
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Publication No.: US10998359B2Publication Date: 2021-05-04
- Inventor: Yueh-Chuan Lee , Chia-Chan Chen
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L21/02 ; H01L29/06

Abstract:
The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip has a photodetector region arranged within a semiconductor substrate. One or more dielectric materials are disposed within a trench defined by one or more interior surfaces of the semiconductor substrate. A doped epitaxial material is arranged within the trench and is laterally between the one or more dielectric materials and the photodetector region. A dielectric protection layer is arranged over the one or more dielectric materials within the trench. The dielectric protection layer laterally contacts a sidewall of the doped epitaxial material.
Public/Granted literature
- US20200212093A1 IMAGE SENSOR WITH SHALLOW TRENCH EDGE DOPING Public/Granted day:2020-07-02
Information query
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