Invention Grant
- Patent Title: Semiconductor device
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Application No.: US16531642Application Date: 2019-08-05
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Publication No.: US10998437B2Publication Date: 2021-05-04
- Inventor: Tatsuya Ohguro , Tatsuya Nishiwaki , Hideharu Kojima , Yoshiharu Takada , Kikuo Aida , Kentaro Ichinoseki , Kohei Oasa , Shingo Sato
- Applicant: Kabushiki Kaisha Toshiba , Toshiba Electronic Devices & Storage Corporation
- Applicant Address: JP Minato-ku; JP Minato-ku
- Assignee: Kabushiki Kaisha Toshiba,Toshiba Electronic Devices & Storage Corporation
- Current Assignee: Kabushiki Kaisha Toshiba,Toshiba Electronic Devices & Storage Corporation
- Current Assignee Address: JP Minato-ku; JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JPJP2018-211902 20181112
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/417 ; H01L23/00 ; H01L23/532

Abstract:
A semiconductor device according to an embodiment includes a semiconductor substrate having a first plane and a second plane, a semiconductor element provided in the semiconductor substrate, the semiconductor element including a gate insulating film provided in the first plane, a first electrode provided on the first plane, a second electrode provided on the first electrode, the second electrode including a first metal material, the second electrode having a film thickness of (65 [g·μm·cm−3])/(density of the first metal material [g·cm−3]) or more, a first solder portion provided on the second electrode, a third electrode provided on the first solder portion, a fourth electrode provided on the first plane, a fifth electrode provided on the fourth electrode, the fifth electrode including a second metal material, the fifth electrode having a film thickness of (65 [g·μm·cm−3])/(density of the second metal material [g·cm−3]) or more, a second solder portion provided on the fifth electrode, and a sixth electrode provided on the second solder portion.
Public/Granted literature
- US20200152785A1 SEMICONDUCTOR DEVICE Public/Granted day:2020-05-14
Information query
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