Invention Grant
- Patent Title: XBAR resonators with non-rectangular diaphragms
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Application No.: US16838984Application Date: 2020-04-02
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Publication No.: US10998882B2Publication Date: 2021-05-04
- Inventor: Ventsislav Yantchev , Patrick Turner , Viktor Plesski , Julius Koskela , Robert B. Hammond
- Applicant: Resonant Inc.
- Applicant Address: US CA Goleta
- Assignee: Resonant Inc.
- Current Assignee: Resonant Inc.
- Current Assignee Address: US CA Goleta
- Agency: Socal IP Law Group LLP
- Agent John E. Gunther
- Main IPC: H03H9/56
- IPC: H03H9/56 ; H03H9/02 ; H03H9/17 ; H03H9/13 ; H03H9/60 ; H03H3/02 ; H01L41/047

Abstract:
Acoustic resonator devices, filter devices, and methods of fabrication are disclosed. An acoustic resonator includes a substrate having a surface and a single-crystal piezoelectric plate having front and back surfaces. The back surface is attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate, the diaphragm having an edge about a perimeter of the cavity. An interdigital transducer (IDT) is formed on the front surface of the single-crystal piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm. The IDT is configured to excite a primary acoustic mode in the diaphragm in response to a radio frequency signal applied to the IDT. At least a portion of the edge of the diaphragm is at an oblique angle to the fingers and to an X crystalline axis of the piezoelectric plate.
Public/Granted literature
- US20200235719A1 XBAR RESONATORS WITH NON-RECTANGULAR DIAPHRAGMS Public/Granted day:2020-07-23
Information query
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