Invention Grant
- Patent Title: Method for manufacturing microfluid delivery device
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Application No.: US14981701Application Date: 2015-12-28
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Publication No.: US11001061B2Publication Date: 2021-05-11
- Inventor: Dino Faralli , Laura Maria Castoldi , Paolo Ferrari , Marta Carminati
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed Intellectual Property Law Group LLP
- Main IPC: B41J2/16
- IPC: B41J2/16 ; B41J2/14 ; H01L21/02 ; H01L21/311 ; H01L21/285 ; C23C16/34

Abstract:
Methods for manufacturing a microfluidic delivery device comprising a semiconductor structure, such as silicon, are provided. In particular, the structure for delivering fluid may be formed from polycrystalline silicon, also called polysilicon, or epitaxial silicon. The microfluidic delivery device that predominantly uses semiconductor material, such as silicon, to form the structures that are in contact with the dispensed fluid results in a device that is compatible with a wide set of fluids and applications.
Public/Granted literature
- US20160121612A1 MICROFLUID DELIVERY DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2016-05-05
Information query
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