Invention Grant
- Patent Title: Stocking system
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Application No.: US16893409Application Date: 2020-06-04
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Publication No.: US11001442B2Publication Date: 2021-05-11
- Inventor: Guan-Cyun Li , Chi-Feng Tung , Fu-Hsien Li , Hsiang-Yin Shen
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- Main IPC: B65G1/04
- IPC: B65G1/04 ; H01L21/677

Abstract:
A stocking system is provided. The stocking system includes a wafer carrier, a stocking unit, a plurality of pod stoppers and at least one positioning pin. The stocking unit is configured to store the wafer carrier, and includes a carrying plate for carrying the wafer carrier. The pod stoppers stand on an edge of the carrying plate. The at least one positioning pin is disposed on a front portion of the carrying plate, such that the wafer carrier leans against the at least one positioning pin and is tilted toward a back portion of the carrying plate.
Public/Granted literature
- US20200299060A1 STOCKING SYSTEM Public/Granted day:2020-09-24
Information query
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