Invention Grant
- Patent Title: Polishing slurry composition
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Application No.: US16189236Application Date: 2018-11-13
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Publication No.: US11001732B2Publication Date: 2021-05-11
- Inventor: Hye Jung Park , Jae Hyun Kim , Jong Dai Park , Min Gun Lee , Jong Chul Shin , Sung Hoon Jin
- Applicant: Dongjin Semichem Co., Ltd.
- Applicant Address: KR Incheon
- Assignee: Dongjin Semichem Co., Ltd.
- Current Assignee: Dongjin Semichem Co., Ltd.
- Current Assignee Address: KR Incheon
- Agency: Nelson Mullins Riley & Scarborough LLP
- Agent Kongsik Kim, Esq.
- Priority: KR10-2016-0061230 20160519
- Main IPC: C09G1/02
- IPC: C09G1/02 ; C09K3/14 ; H01L21/3105 ; H01L21/304 ; H01L21/321

Abstract:
Disclosed is a chemical-mechanical polishing slurry composition having a small change in pH over time under an acidic condition and thus being easy to store for a long time. The chemical-mechanical polishing slurry composition includes an abrasive; an amount of about 0.000006 to 0.01 weight % of an aluminum component based on the total weight of the polishing slurry composition; and water. The number of silanol groups on a surface of the abrasive and a content of the aluminum component satisfy the requirements of following Equation 1: 0.0005≤(S*C)*100≤4.5, [Equation 1] wherein, S is the number of the silanol groups present on 1 nm2 of the abrasive surface (unit: number/nm2), and C is the content of the aluminum component (weight %) in the slurry composition.
Public/Granted literature
- US20190077994A1 POLISHING SLURRY COMPOSITION Public/Granted day:2019-03-14
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