- Patent Title: Multi-chamber deposition equipment for solid free form fabrication
-
Application No.: US16927164Application Date: 2020-07-13
-
Publication No.: US11001920B2Publication Date: 2021-05-11
- Inventor: Trond Forseth , Brede Vigdal , Arne Ramsland , Svein Steinsvik , Jorgen Haugen
- Applicant: Norsk Titanium AS
- Applicant Address: NO Honefoss
- Assignee: Norsk Titanium AS
- Current Assignee: Norsk Titanium AS
- Current Assignee Address: NO Honefoss
- Agency: Lee & Hayes, P.C.
- Main IPC: B22F3/105
- IPC: B22F3/105 ; C23C14/24 ; C23C14/50

Abstract:
Provided is a chamber system for solid free form fabrication, the chamber system having a deposition chamber, a service chamber and one or more loading/unloading chambers. The chamber system allows for a more efficient and cost effective process to service the deposition apparatus, load holding substrates, and unload workpieces without requiring having to adjust the atmosphere in the deposition chamber.
Public/Granted literature
- US20200340099A1 MULTI-CHAMBER DEPOSITION EQUIPMENT FOR SOLID FREE FORM FABRICATION Public/Granted day:2020-10-29
Information query