Invention Grant
- Patent Title: Method for inspecting light-emitting diodes and inspection apparatus
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Application No.: US16231607Application Date: 2018-12-24
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Publication No.: US11002783B2Publication Date: 2021-05-11
- Inventor: Yan-Rung Lin , Chih-Hsiang Liu , Shie-Chang Jeng
- Applicant: Industrial Technology Research Institute
- Applicant Address: TW Hsinchu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- Priority: TW107146378 20181221
- Main IPC: G01R31/26
- IPC: G01R31/26 ; G01R31/01 ; G01R29/14

Abstract:
A method for inspecting light-emitting diodes (LEDs) including following steps is provided. A plurality of LEDs are provided. A charge distribution, an electrical field distribution, or a voltage distribution on the LEDs that are irradiated by an illumination beam at the same time are inspected by a sensing probe, so as to determine electro-optical characteristics of the LEDs. Besides, an inspection apparatus is also provided.
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