- Patent Title: Pressurized tin collection bucket with in-line draining mechanism
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Application No.: US16816255Application Date: 2020-03-12
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Publication No.: US11003067B2Publication Date: 2021-05-11
- Inventor: Chi Yang , Hsin-Feng Chen , Li-Jui Chen
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: McDermott Will & Emery LLP
- Main IPC: G03F1/22
- IPC: G03F1/22 ; G03F7/20 ; G03F1/70 ; G03F1/42
Abstract:
A droplet collection bucket includes a droplet collection tube, a level sensor positioned on the droplet collection tube, a gate valve configured to close a rear portion of the droplet collection tube, a gas supply configured to supply a gas into the rear portion of the droplet collection tube, a heating element wrapping around the droplet collection tube, and a drain tube connecting an interior of the droplet collection tube with an outside of the droplet collection tube.
Public/Granted literature
- US20200209731A1 PRESSURIZED TIN COLLECTION BUCKET WITH IN-LINE DRAINING MECHANISM Public/Granted day:2020-07-02
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